Gradient-Based Source and Mask Optimization in Optical Lithography

DOI10.1109/TIP.2011.2131668zbMath1372.94207OpenAlexW1991610979WikidataQ51586252 ScholiaQ51586252MaRDI QIDQ5370244

Yao Peng, Yan Wang, Zhiping Yu, Jinyu Zhang

Publication date: 19 October 2017

Published in: IEEE Transactions on Image Processing (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1109/tip.2011.2131668

Mathematics Subject Classification ID

Image processing (compression, reconstruction, etc.) in information and communication theory (94A08) Source coding (94A29) Geometric optics (78A05)

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