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Friction modeling in linear chemical-mechanical planarization - MaRDI portal

Friction modeling in linear chemical-mechanical planarization

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Publication:5375666

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DOI10.1109/MCS.2008.927333zbMath1395.93438MaRDI QIDQ5375666

Publication date: 14 September 2018

Published in: IEEE Control Systems (Search for Journal in Brave)

Mathematics Subject Classification ID

Classical flows, reactions, etc. in chemistry (92E20) Application models in control theory (93C95) Friction in solid mechanics (74M10) Fluid-solid interactions (including aero- and hydro-elasticity, porosity, etc.) (74F10)

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