Feedforward control of piezoactuators in atomic force microscope systems

DOI10.1109/MCS.2008.930922zbMath1395.93231OpenAlexW2101544107MaRDI QIDQ5375685

Santosh Devasia, Kam K. Leang, Qingze Zou

Publication date: 14 September 2018

Published in: IEEE Control Systems (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1109/mcs.2008.930922

Mathematics Subject Classification ID

Control, switches and devices (``smart materials) in solid mechanics (74M05) Feedback control (93B52)

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