The Four Pillars of Nanopositioning for Scanning Probe Microscopy: The Position Sensor, the Scanning Device, the Feedback Controller, and the Reference Trajectory

DOI10.1109/MCS.2013.2279473zbMath1395.93434OpenAlexW1975184175MaRDI QIDQ5375865

Tomas Tuma, Angeliki Pantazi, John Lygeros, Abu Sebastian

Publication date: 14 September 2018

Published in: IEEE Control Systems (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1109/mcs.2013.2279473

Mathematics Subject Classification ID

Application models in control theory (93C95)

Related Items (1)

Trajectory tracking of a class of uncertain systems applied to vehicle platooning and antenna scanning systems

This page was built for publication: The Four Pillars of Nanopositioning for Scanning Probe Microscopy: The Position Sensor, the Scanning Device, the Feedback Controller, and the Reference Trajectory