A practical fab design procedure for wafer fabrication plants

DOI10.1080/00207540601050384zbMath1160.90381OpenAlexW2042101375MaRDI QIDQ5385496

Rui-De Dai, James C. Chen, Chia-Wen Chen

Publication date: 6 May 2008

Published in: International Journal of Production Research (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00207540601050384

zbMATH Keywords

facility layoutfacility designfacility planningsemiconductor manufacture

Mathematics Subject Classification ID

Production models (90B30)

Related Items (1)

Capacity planning of serial and batch machines with capability constraints for wafer fabrication plants

Cites Work

• Integrating design and production planning considerations in multi-bay manufacturing facility layout
• The multi-bay manufacturing facility layout problem

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