scientific article; zbMATH DE number 5879489

zbMATH Open1216.82047MaRDI QIDQ5393467

Jürgen Meichsner

Publication date: 18 April 2011

Title of this publication is not available (Why is that?)

zbMATH Keywords

nonequilibrium plasmasemiconductor processingplasma-surface interaction

Mathematics Subject Classification ID

Rarefied gas flows, Boltzmann equation in fluid mechanics (76P05) Statistical mechanics of plasmas (82D10)

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