Hysteresis Compensation and Adaptive Controller Design for a Piezoceramic Actuator System in Atomic Force Microscopy

DOI10.1002/ASJC.453zbMath1286.93102OpenAlexW1974020398MaRDI QIDQ5417012

Ping-Lang Yen, Yil Chen, Mu-Tian Yan

Publication date: 15 May 2014

Published in: Asian Journal of Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/asjc.453

zbMATH Keywords

hysteresisatomic force microscope (AFM)piezoceramic actuatorfeedforward controllerindirect adaptive controller

Mathematics Subject Classification ID

Nonlinear systems in control theory (93C10) Design techniques (robust design, computer-aided design, etc.) (93B51) Adaptive control/observation systems (93C40)

Related Items (5)

Robust <scp>H</scp>^∞ Control in Fast Atomic Force Microscopy ⋮ The design of model predictive control for an AFM and its impact on piezo nonlinearities ⋮ A fast non-singular terminal sliding mode control based on perturbation estimation for piezoelectric actuators systems ⋮ Fuzzy PID feedback control of piezoelectric actuator with feedforward compensation ⋮ Effect of Improved Tracking for Atomic Force Microscope on Piezo Nonlinear Behavior

Cites Work

• Adaptive control
• Preisach modeling of hysteresis for piezoceramic actuator system
• Dynamic Preisach modelling of hysteresis for the piezoceramic actuator system

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