On the evaluation of damping in MEMS in the slip-flow regime
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Publication:5435373
DOI10.1002/nme.1749zbMath1127.76020OpenAlexW2143760842MaRDI QIDQ5435373
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Publication date: 14 January 2008
Published in: International Journal for Numerical Methods in Engineering (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1002/nme.1749
Experimental work for problems pertaining to fluid mechanics (76-05) Stokes and related (Oseen, etc.) flows (76D07) Boundary element methods applied to problems in fluid mechanics (76M15)
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