scientific article; zbMATH DE number 5230323
From MaRDI portal
Publication:5437757
zbMath1131.80300MaRDI QIDQ5437757
St. Iovan, Robert M. Szabo, Stefan Balint, László Nánai, Agneta M. Balint
Publication date: 28 January 2008
Title: zbMATH Open Web Interface contents unavailable due to conflicting licenses.
crystallographic orientationgrowth mechanismDeal-Grove differential equationsilicon oxidthermal oxidation model
This page was built for publication: