Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots

DOI10.1080/00207540600792531zbMath1128.90498OpenAlexW2055893616WikidataQ58199785 ScholiaQ58199785MaRDI QIDQ5438627

Sang Jin Lee, Tae-Eog Lee, Hwan-Yong Lee

Publication date: 24 January 2008

Published in: International Journal of Production Research (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00207540600792531

zbMATH Keywords

schedulingPetri netssemiconductor manufacturinghandling robotswet station

Mathematics Subject Classification ID

Deterministic scheduling theory in operations research (90B35)

Related Items (5)

A branch and bound algorithm for optimal cyclic scheduling in a robotic cell with processing time windows ⋮ Optimal cyclic scheduling of a hoist and multi-type parts with fixed processing times ⋮ Sequencing optimisation for makespan improvement at wet-etch tools ⋮ No-wait flowshop scheduling problem with two criteria; total tardiness and makespan ⋮ A survey of scheduling problems with no-wait in process

Cites Work

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• Analysis of deadlock and circular waits using a matrix model for flexible manufacturing systems
• Cyclic scheduling in a robotic production line
• Cyclic scheduling in robotic flowshops
• Comments on "Deadlock avoidance policy for Petri net modeling of flexible manufacturing systems with shared resources
• Performance Measures and Schedules in Periodic Job Shops
• Optimal Cyclic Multi-Hoist Scheduling: A Mixed Integer Programming Approach

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