A review of yield modelling techniques for semiconductor manufacturing

DOI10.1080/00207540600596874zbMath1128.90400OpenAlexW2082026549MaRDI QIDQ5444429

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Publication date: 25 February 2008

Published in: International Journal of Production Research (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00207540600596874

zbMATH Keywords

semiconductor manufacturingyield modelling

Mathematics Subject Classification ID

Production models (90B30)

Cites Work

• Unnamed Item
• A systems approach to photolithography process optimization in an electronics manufacturing environment
• Sequential Screening in Semiconductor Manufacturing, I: Exploiting Spatial Dependence

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