A nonlinear model predictive control approach for robust end‐point property control of a thin‐film deposition process

DOI10.1002/rnc.1212zbMath1131.93338OpenAlexW2003264955WikidataQ59051131 ScholiaQ59051131MaRDI QIDQ5449741

Zoltán K. Nagy, Frank Allgöwer

Publication date: 18 March 2008

Published in: International Journal of Robust and Nonlinear Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/rnc.1212

zbMATH Keywords

receding horizon controlnonlinear model predictive controlthin-film deposition

Mathematics Subject Classification ID

Feedback control (93B52) Nonlinear systems in control theory (93C10) Control/observation systems with incomplete information (93C41)

Cites Work

• MAKING A DISCRETE DYNAMICAL SYSTEM CHAOTIC: THEORETICAL RESULTS AND NUMERICAL SIMULATIONS
• Unnamed Item
• Unnamed Item

This page was built for publication: A nonlinear model predictive control approach for robust end‐point property control of a thin‐film deposition process