Analysis of electromagnetic diffraction by three-dimensional bodies using the discrete-sources method
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Publication:5933045
zbMath0993.78005MaRDI QIDQ5933045
Yu. A. Eremin, A. G. Sveshnikov
Publication date: 8 July 2001
Published in: Computational Mathematics and Mathematical Physics (Search for Journal in Brave)
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Discrete sources method for light scattering analysis of non-axisymmetric features of a substrate ⋮ Analysis of inhomogeneities on wafers by the integral transform method
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