Automated inspection of IC wafer contamination

DOI10.1016/S0031-3203(00)00070-4zbMath0984.68693OpenAlexW2065989284MaRDI QIDQ5950299

Reza Aghaeizadeh Zoroofi, Yoshinobu Sato, Shinichi Tamura, Kazuma Sekiya, Hisashi Taketani

Publication date: 14 May 2002

Published in: Pattern Recognition (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/s0031-3203(00)00070-4

zbMATH Keywords

neural networkscontamination classificationIC wafer inspection

Mathematics Subject Classification ID

Pattern recognition, speech recognition (68T10) Computing methodologies and applications (68U99)

Cites Work

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