Analysis of inhomogeneities on wafers by the integral transform method

DOI10.1007/BF02754310zbMath0990.78001MaRDI QIDQ5951165

V. I. Ivakhnenko, Yu. A. Eremin

Publication date: 14 August 2002

Published in: Differential Equations (Search for Journal in Brave)

zbMATH Keywords

scatteringintegral transform methodimpurity particleswafer surface

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Electromagnetic theory (general) (78A25)

Related Items (1)

Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method

Cites Work

• Analysis of electromagnetic diffraction by three-dimensional bodies using the discrete-sources method
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