Simulation and model reduction methods for an RF plasma glow discharge

DOI10.1006/jcph.2001.6808zbMath1065.76633OpenAlexW2020073736MaRDI QIDQ5951793

Raymond A. Adomaitis, Yi-hung Lin

Publication date: 2001

Published in: Journal of Computational Physics (Search for Journal in Brave)

Full work available at URL: https://semanticscholar.org/paper/0770ab4f4d33261c284ef9b3a0530ab46c61601e

zbMATH Keywords

model reductioncollocationpseudospectral methodsglobal basis functionsglow dischargeplasma processing

Mathematics Subject Classification ID

Spectral methods applied to problems in fluid mechanics (76M22) Ionized gas flow in electromagnetic fields; plasmic flow (76X05)

Related Items

A reduced-basis discretization method for chemical vapor deposition reactor simulation ⋮ A numerical method to simulate radio-frequency plasma discharges ⋮ On accuracy and performance of high-order finite volume methods in local mean energy model of non-thermal plasmas

Uses Software

• MWRtools

Cites Work

• Unnamed Item
• Unnamed Item
• A staggered-mesh finite-difference numerical method for solving the transport equations in low pressure RF glow discharges
• Finite-dimensional control of parabolic PDE systems using approximate inertial manifolds
• An application of inertial manifold theory to boundary stabilization of semilinear diffusion systems
• Optimal low-dimensional dynamical approximations
• Turbulence and the dynamics of coherent structures. I. Coherent structures
• An efficient method of solving the Navier-Stokes equations for flow control
• Low-dimensional models for complex geometry flows: Application to grooved channels and circular cylinders
• Turbulence, Coherent Structures, Dynamical Systems and Symmetry
• A Computational Framework for Boundary-Value Problem Based Simulations
• A Practical Guide to Pseudospectral Methods