Three-dimensional magnetic field analyses on the magnetron sputtering system by using Free Mesh Method

DOI10.1016/S0010-4655(01)00367-8zbMath0996.78506OpenAlexW1984410415WikidataQ126865177 ScholiaQ126865177MaRDI QIDQ5956365

Shunji Ido, Ryusuke Hirose

Publication date: 24 July 2002

Published in: Computer Physics Communications (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/s0010-4655(01)00367-8

zbMATH Keywords

finite element methodmagnetic field analysismagnetron sputtering systemmesh method

Mathematics Subject Classification ID

Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10) Technical applications of optics and electromagnetic theory (78A55)

Related Items (1)

A micromechanics-based finite element model for the constitutive behavior of polycrystalline ferromagnets

Cites Work

• Free mesh method: A new meshless finite element method
• Large-scale parallel flow analysis based on free mesh method: A virtually meshless method

This page was built for publication: Three-dimensional magnetic field analyses on the magnetron sputtering system by using Free Mesh Method