3D-measurement using a scanning electron microscope

DOI10.1016/J.AMC.2010.01.107zbMath1202.78021OpenAlexW2038492274MaRDI QIDQ603088

Thanin Schultheis, Taras Vynnyk, Eduard Reithmeier

Publication date: 5 November 2010

Published in: Applied Mathematics and Computation (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.amc.2010.01.107

zbMATH Keywords

shape from shadingbackscattered electronsphotometric methodscanning electron microscopesecondary electrons

Mathematics Subject Classification ID

Diffraction, scattering (78A45) Technical applications of optics and electromagnetic theory (78A55) Electron optics (78A15)

Cites Work

• On the Efficacy of Nonlinear Control in Uncertain Linear Systems
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