Investigation of the enhancement of microelectromechanical capacitive pressure sensor performance using the genetic algorithm optimization technique
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Publication:6094282
DOI10.1080/0305215X.2019.1694673zbMATH Open1523.74029OpenAlexW2994220572WikidataQ126628021 ScholiaQ126628021MaRDI QIDQ6094282
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Publication date: 10 October 2023
Published in: (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1080/0305215x.2019.1694673
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