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A new method for relaxation of elastic stresses during the growth of heteroepitaxial films - MaRDI portal

A new method for relaxation of elastic stresses during the growth of heteroepitaxial films

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Publication:6171810

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DOI10.3103/s0025654422601392zbMath1526.74047OpenAlexW4376503085MaRDI QIDQ6171810

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Publication date: 18 July 2023

Published in: Mechanics of Solids (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.3103/s0025654422601392

zbMATH Keywords

nanostructure crystal orientation coordinated atoms substitution method semipolar aluminum nitride

Mathematics Subject Classification ID

Crystalline structure (74E15) Micromechanics of solids (74M25) Thin films (74K35) Molecular, statistical, and kinetic theories in solid mechanics (74A25)

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