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Pattern scaling effect on the radiative properties of wafer's surface - MaRDI portal

Pattern scaling effect on the radiative properties of wafer's surface

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Publication:617204

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DOI10.1007/s11431-010-3230-2zbMath1205.78010OpenAlexW2054008425MaRDI QIDQ617204

AiHua Wang, Jiu-Ju Cai

Publication date: 21 January 2011

Published in: Science China. Technological Sciences (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s11431-010-3230-2

zbMATH Keywords

finite-difference time-domain method effective medium theory patterned wafer radiative property resonance cavity effect

Mathematics Subject Classification ID

Finite difference methods applied to problems in optics and electromagnetic theory (78M20) Technical applications of optics and electromagnetic theory (78A55) Electromagnetic theory (general) (78A25) Waves and radiation in optics and electromagnetic theory (78A40)

Cites Work

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