Design and modeling of some sensing and actuating mechanisms for MEMS applications

DOI10.1016/J.APM.2011.04.015zbMath1228.74107OpenAlexW2095203365MaRDI QIDQ651720

Shahriar Kouravand

Publication date: 18 December 2011

Published in: Applied Mathematical Modelling (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.apm.2011.04.015

zbMATH Keywords

MEMSsensingcapacitanceactuatingbimetal

Mathematics Subject Classification ID

Finite difference methods applied to problems in solid mechanics (74S20)

Related Items (3)

Nonlinear dynamic analysis of electrically actuated viscoelastic bistable microbeam system ⋮ Nonlinear and chaos control of a micro-electro-mechanical system by using second-order fast terminal sliding mode control ⋮ Electrostatically actuated initially curved micro beams: analytical and finite element modelling

This page was built for publication: Design and modeling of some sensing and actuating mechanisms for MEMS applications