Implementation and evaluation of the level set method: towards efficient and accurate simulation of wet etching for microengineering applications

DOI10.1016/j.cpc.2013.05.016MaRDI QIDQ6556352

J. Cerdá, M. A. Gosálvez, C. Montoliu, R. J. Colom, Néstor Ferrando

Publication date: 17 June 2024

Published in: Computer Physics Communications (Search for Journal in Brave)

cellular automata parallel computing level set method MEMS GPU sparse field method anisotropic wet chemical etching microengineering

Mathematics Subject Classification ID

Fluid mechanics (76-XX) Computer science (68-XX)

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