A virtual metrology system based on least angle regression and statistical clustering

DOI10.1002/ASMB.1948MaRDI QIDQ6570838

Alessandro Beghi, Gian Antonio Susto

Publication date: 10 July 2024

Published in: Applied Stochastic Models in Business and Industry (Search for Journal in Brave)

zbMATH Keywords

neural networkssemiconductor manufacturingvirtual metrologyleast angle regressionstatistical distance

Mathematics Subject Classification ID

Statistics (62-XX)

Cites Work

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• Least angle regression. (With discussion)
• A user's guide to measure theoretic probability
• Cross-Validation of Regression Models
• Linear Model Selection by Cross-Validation
• On Information and Sufficiency
• The Elements of Statistical Learning

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