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Convolutional neural network based multi-input multi-output model for multi-sensor multivariate virtual metrology in semiconductor manufacturing - MaRDI portal

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Convolutional neural network based multi-input multi-output model for multi-sensor multivariate virtual metrology in semiconductor manufacturing

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Publication:6589069

DOI10.1007/S10479-024-05902-ZMaRDI QIDQ6589069

Author name not available (Why is that?)

Publication date: 19 August 2024

Published in: (Search for Journal in Brave)




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