Applying invariant embedding methods to the theory of thin film sputtering by light-ion bombardment

DOI10.3103/S1062873810020280zbMath1236.82065MaRDI QIDQ662795

V. V. Manukhin, M. K. Gubkin, A. A. Barat

Publication date: 24 February 2012

Published in: Bulletin of the Russian Academy of Sciences: Physics (Search for Journal in Brave)

zbMATH Keywords

Boltzmann kinetic equationsputtering

Mathematics Subject Classification ID

Rarefied gas flows, Boltzmann equation in fluid mechanics (76P05) Interface problems; diffusion-limited aggregation arising in equilibrium statistical mechanics (82B24) Statistical mechanics of solids (82D20) Statistical mechanics of plasmas (82D10)

Cites Work

• New Approach to Low-Energy Potential Scattering

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