Deprecated: $wgMWOAuthSharedUserIDs=false is deprecated, set $wgMWOAuthSharedUserIDs=true, $wgMWOAuthSharedUserSource='local' instead [Called from MediaWiki\HookContainer\HookContainer::run in /var/www/html/w/includes/HookContainer/HookContainer.php at line 135] in /var/www/html/w/includes/Debug/MWDebug.php on line 372
Projection electron beam lithography for nanotechnology - MaRDI portal

Projection electron beam lithography for nanotechnology

From MaRDI portal

Publication:664018

Jump to:navigation, search

DOI10.3103/S1062873810070270zbMath1236.82157MaRDI QIDQ664018

B. V. Troshin, O. D. Potapkin

Publication date: 28 February 2012

Published in: Bulletin of the Russian Academy of Sciences: Physics (Search for Journal in Brave)

zbMATH Keywords

beam lithography stochastic aberration

Mathematics Subject Classification ID

Statistical mechanics of nanostructures and nanoparticles (82D80)

This page was built for publication: Projection electron beam lithography for nanotechnology

Retrieved from "https://portal.mardi4nfdi.de/w/index.php?title=Publication:664018&oldid=12570102"