Modeling and analysis of a capacitive MEMS with a microstructured gap subjected to a mechanical shock
From MaRDI portal
Publication:6661908
DOI10.1007/s00707-024-04116-5MaRDI QIDQ6661908
Ahmed Hashim Kareem, Ghader Rezazadeh, Mohammad Fathalilou
Publication date: 13 January 2025
Published in: Acta Mechanica (Search for Journal in Brave)
This page was built for publication: Modeling and analysis of a capacitive MEMS with a microstructured gap subjected to a mechanical shock