Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology
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Publication:6670697
DOI10.1016/j.jcp.2024.113519MaRDI QIDQ6670697
Samanta Piano, Stephan Reichelt, Richard Leach, Tobias Pahl, Poul-Erik Hansen, Alexander Birk, Liwei Fu, Helia Hooshmand, Mirza Karamehmedović, P. Lehmann
Publication date: 24 January 2025
Published in: Journal of Computational Physics (Search for Journal in Brave)
Basic methods for problems in optics and electromagnetic theory (78Mxx) General topics in optics and electromagnetic theory (78Axx)
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