Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology

DOI10.1016/j.jcp.2024.113519MaRDI QIDQ6670697

Samanta Piano, Stephan Reichelt, Richard Leach, Tobias Pahl, Poul-Erik Hansen, Alexander Birk, Liwei Fu, Helia Hooshmand, Mirza Karamehmedović, P. Lehmann

Publication date: 24 January 2025

Published in: Journal of Computational Physics (Search for Journal in Brave)

zbMATH Keywords

electric field light scattering Maxwell's equation rigorous model

Mathematics Subject Classification ID

Basic methods for problems in optics and electromagnetic theory (78Mxx) General topics in optics and electromagnetic theory (78Axx)

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