Concepts and algorithms in process simulation

zbMath0783.65084MaRDI QIDQ688756

Utz Wever, Ulrich Weinert, Meinhard Paffrath, Wolfram Klein, Karl Steger, Werner Jacobs, Ernst Rank

Publication date: 6 December 1993

Published in: Surveys on Mathematics for Industry (Search for Journal in Brave)

zbMATH Keywords

finite elementsadaptive grid refinementnumerical algorithmssemiconductor devices\(2D\) process simulator MIMAS-IIgeometrical device structureprocess simulation

Mathematics Subject Classification ID

Probabilistic models, generic numerical methods in probability and statistics (65C20) Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs (65N30) Technical applications of optics and electromagnetic theory (78A55) Applications to the sciences (65Z05)

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