A continuum theory of multispecies thin solid film growth by chemical vapor deposition

DOI10.1023/B:ELAS.0000030018.40095.D5zbMath1079.74044OpenAlexW2064503757WikidataQ59718280 ScholiaQ59718280MaRDI QIDQ702330

Michel E. Jabbour, Kaushik Bhattacharya

Publication date: 17 January 2005

Published in: Journal of Elasticity (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1023/b:elas.0000030018.40095.d5

zbMATH Keywords

conservation lawsconfigurational force balance

Mathematics Subject Classification ID

Structured surfaces and interfaces, coexistent phases (74A50) Thin films (74K35) Chemical structure in solid mechanics (74E40)

Related Items (3)

Multispecies epitaxial growth on vicinal surfaces with chemical reactions and diffusion ⋮ Epitaxy of binary compounds and alloys ⋮ Diffusion in mixtures of reacting thermoelastic solids

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