Sparse field level set method for non-convex Hamiltonians in 3D plasma etching profile simulations

DOI10.1016/J.CPC.2005.09.010zbMath1196.65218OpenAlexW2171336223MaRDI QIDQ709928

Jae Koo Lee, Branislav Radjenović, Marija Radmilović-Radjenović

Publication date: 18 October 2010

Published in: Computer Physics Communications (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.cpc.2005.09.010

zbMATH Keywords

level set method3D simulationsetching profilenon-convex Hamiltoniansplasma etchingsparse field method

Mathematics Subject Classification ID

Statistical mechanics of crystals (82D25) Applications to the sciences (65Z05)

Related Items (2)

The surface charging effects in three-dimensional simulation of the profiles of plasma-etched nanostructures ⋮ Geometric advection and its application in the emulation of high aspect ratio structures

Cites Work

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• Fronts propagating with curvature-dependent speed: Algorithms based on Hamilton-Jacobi formulations
• Shock capturing, level sets, and PDE based methods in computer vision and image processing: A review of Osher's contributions
• A level set approach to a unified model for etching, deposition, and lithography. I: Algorithms and two-dimensional simulations
• A level set approach to a unified model for etching, deposition, and lithography. II: Three-dimensional simulations
• Level set methods and their applications in image science
• High-Order Essentially Nonoscillatory Schemes for Hamilton–Jacobi Equations
• Evolution, implementation, and application of level set and fast marching methods for advancing fronts

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