Investigation of static and dynamic characteristics of a piezomotor for nano-and micrometric movements
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Publication:734241
DOI10.1134/S1064230708050110zbMath1173.93367OpenAlexW2018671450MaRDI QIDQ734241
Publication date: 20 October 2009
Published in: Journal of Computer and Systems Sciences International (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1134/s1064230708050110
nano- and micrometric movementsnanotechnology and microelectronics equipmentstatic and dynamic characteristics of a piezomotor
Related Items (4)
Correcting devices of control systems for deformation of multilayered piezodrives of nano- and micrometric movements ⋮ Adaptive time-optimal control of a robotic manipulator ⋮ Multidimensional structural parametric model and block diagram of multilayer electro-magneto-elastic actuator of nano and micro displacements ⋮ Physical characteristics of the sensing elements of feedback sensors combined with thermomechanical actuators for plant micromotion control systems
Cites Work
- Solution of the wave equation for the control of an electromagnetoelastic transducer
- A generalized structural-parametric model of an electromagnetoelastic converter for nano- and micrometric movement control systems. III. Transformation of parametric structural circuits of an electromagnetoelastic converter for nano- and micrometric movement control systems
- Generalized structural parametric model of an electromagnetoelastic transducer for control systems of nano- and microdisplacements. II: On the generalized structural parametric model of a compound electromagnetoelastic transducer
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