Deflection and stability of membrane structures under electrostatic and Casimir forces in microelectromechanical systems
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Publication:813816
DOI10.1007/S00707-005-0265-8zbMath1138.74359OpenAlexW2027362870MaRDI QIDQ813816
Publication date: 31 January 2006
Published in: Acta Mechanica (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s00707-005-0265-8
Bifurcation and buckling (74G60) Electromagnetic effects in solid mechanics (74F15) Membranes (74K15)
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