Frequency shift prediction of a shear mode multi-layered FBAR sensor in viscous media using transfer matrix method
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Publication:821831
DOI10.1016/J.APM.2021.07.009zbMath1481.74195OpenAlexW3181919584MaRDI QIDQ821831
Zinan Zhao, Yook-Kong Yong, Zheng-Hua Qian
Publication date: 21 September 2021
Published in: Applied Mathematical Modelling (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.apm.2021.07.009
frequency equationfrequency shift\(c\)-axis tilted multi-layered FBARelectrode effectshear modeviscous media
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