Stable method for optical monitoring the deposition of multilayer optical coatings

DOI10.1134/S0965542520120064zbMath1455.78013OpenAlexW3120532818MaRDI QIDQ828142

A. A. Lagutina, A. V. Tikhonravov, Yu. S. Lagutin, Igor V. Kochikov, Anatoly G. Yagola, Dmitry V. Lukyanenko

Publication date: 8 January 2021

Published in: Computational Mathematics and Mathematical Physics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1134/s0965542520120064

zbMATH Keywords

numerical algorithmsanalysis of experimental datamonochromatic optical monitoringmultilayer coatings

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Basic methods for problems in optics and electromagnetic theory (78M99) Experimental work for problems pertaining to optics and electromagnetic theory (78-05)

Related Items (1)

Comparative analysis of algorithms for solving inverse problems related to monochromatic monitoring the deposition of multilayer optical coatings

Cites Work

• Raising the accuracy of monitoring the optical coating deposition by application of a nonlocal algorithm of data analysis

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