Multi-layer thin films/substrate system subjected to non-uniform misfit strains
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Publication:837355
DOI10.1016/j.ijsolstr.2007.09.012zbMath1169.74480OpenAlexW1974322413MaRDI QIDQ837355
Publication date: 10 September 2009
Published in: International Journal of Solids and Structures (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.ijsolstr.2007.09.012
interfacial shearsnon-uniform misfit strainnon-uniform wafer curvaturesmulti-layer thin filmsnon-local stress-curvature relations
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Cites Work
- Non-uniform, axisymmetric misfit strain in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures
- Bifurcation in isotropic thin film/substrate plates
- Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. I: Analysis for obtaining film stress from non-local curvature information
- Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. II: Experimental validation of the non-local stress/curvature relations
- Extension of Stoney's formula to non-uniform temperature distributions in thin film/substrate systems. The case of radial symmetry
- Thermoelastic analysis of periodic thin lines deposited on a substrate
- Substrate curvature due to thin film mismatch strain in the nonlinear deformation range
- Geometrically nonlinear stress-deflection relations for thin film/substrate systems
- Thin Film Materials
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