The damping in MEMS inertial sensors both at high and low pressure levels

DOI10.1007/s11071-008-9354-2zbMath1178.74077OpenAlexW1989033210MaRDI QIDQ840484

Elisabetta Leo, Ferruccio Resta, Francesco Braghin

Publication date: 11 September 2009

Published in: Nonlinear Dynamics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s11071-008-9354-2

zbMATH Keywords

Navier-Stokes equationskinetic theory of gasesinertial sensorair dampingMEMS modeling

Mathematics Subject Classification ID

Vibrations in dynamical problems in solid mechanics (74H45) Micromechanics of solids (74M25)

Cites Work

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• Kinetic theory and fluid dynamics
• Microflows and nanoflows. Fundamentals and simulation. Foreword by Chih-Ming Ho.
• Analysis of the Air-damping Effect on a Micromachined Beam Resonator
• On the evaluation of damping in MEMS in the slip-flow regime

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