A microbeam bending method for studying stress-strain relations for metal thin films on silicon substrates

DOI10.1016/j.jmps.2004.08.007zbMath1122.74452OpenAlexW2084333067MaRDI QIDQ850043

J. N. Florando, William D. Nix

Publication date: 15 November 2006

Published in: Journal of the Mechanics and Physics of Solids (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.jmps.2004.08.007

zbMATH Keywords

strain hardeningplasticitythin filmsMEMSsmall-scale yielding

Mathematics Subject Classification ID

Experimental work for problems pertaining to mechanics of deformable solids (74-05) Thin films (74K35) Plastic materials, materials of stress-rate and internal-variable type (74C99)

Related Items (4)

Nonlinear electro-dynamic analysis of micro-actuators: effect of material nonlinearity ⋮ Bauschinger and size effects in thin-film plasticity due to defect-energy of geometrical necessary dislocations ⋮ Plastic deformation of freestanding thin films: experiments and modeling ⋮ Dynamic analysis of size-dependent micro-beams with nonlinear elasticity under electrical actuation

Cites Work

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