Computing light masks in neutral atom lithography

DOI10.1016/j.jcp.2006.07.012zbMath1106.78010OpenAlexW2104459344MaRDI QIDQ860316

Carsten Burstedde, Angela Kunoth, Jürgen Braun

Publication date: 9 January 2007

Published in: Journal of Computational Physics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.jcp.2006.07.012

zbMATH Keywords

Fourier transformnonlinear inverse problematom lithographylight maskNelder and Mead simplex method

Mathematics Subject Classification ID

Cites Work

• Optimal reconstruction of a function from its projections
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