On-chip electrostatically actuated bending tests for the mechanical characterization of polysilicon at the micro scale
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Publication:865134
DOI10.1007/S11012-005-2135-9zbMath1146.74322OpenAlexW2022943710MaRDI QIDQ865134
Caterina Riva, Biagio De Masi, Fabrizio Cacchione, Alberto Corigliano
Publication date: 13 February 2007
Published in: Meccanica (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s11012-005-2135-9
Related Items (2)
On-chip electrostatically actuated bending tests for the mechanical characterization of polysilicon at the micro scale ⋮ Monte Carlo simulation of micro-cracking in polysilicon MEMS exposed to shocks
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