Orientation dependence of fracture toughness measured by indentation methods and its relation to surface energy in single crystal silicon

DOI10.1007/s10704-006-0021-7zbMath1146.74353OpenAlexW1979853689MaRDI QIDQ865139

N. E. Zubov

Publication date: 13 February 2007

Published in: International Journal of Fracture (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s10704-006-0021-7

zbMATH Keywords

silicon single crystalfracture toughnesssurface energyindentation

Mathematics Subject Classification ID

Crystalline structure (74E15) Theories of fracture and damage (74A45) Fracture and damage (74Rxx)

Related Items (3)

A domain decomposition approach for the simulation of fracture phenomena in polycrystalline microsystems ⋮ Monte Carlo simulation of micro-cracking in polysilicon MEMS exposed to shocks ⋮ Analytical description of fracture features in single crystal silicon

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