\(\mathrm{BaF}_2\) for microlithography applications: modeling, simulation and optimization of the crystal growth process

DOI10.1016/j.cam.2006.04.020zbMath1149.80005OpenAlexW2014051598MaRDI QIDQ880185

Angel Ribalta, Dirk Wulff-Molder, Axel Voigt, Rainer Backofen

Publication date: 11 May 2007

Published in: Journal of Computational and Applied Mathematics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.cam.2006.04.020

zbMATH Keywords

heat and mass transferheat radiationprocess optimization

Mathematics Subject Classification ID

Uses Software

• crysvun++

Cites Work

• Unnamed Item
• The radiosity equation for solving global heat transfer in industrial furnaces
• Simplified \(P_N\) approximations to the equations of radiative heat transfer and applications
• Numerical Optimization

This page was built for publication: \(\mathrm{BaF}_2\) for microlithography applications: modeling, simulation and optimization of the crystal growth process