A free boundary value problem modeling thermal oxidation of silicon

DOI10.4171/ZAA/282zbMath0694.35222OpenAlexW2565976056MaRDI QIDQ909144

Konrad Gröger, N. Strecker

Publication date: 1988

Published in: Zeitschrift für Analysis und ihre Anwendungen (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.4171/zaa/282

zbMATH Keywords

diffusionuniquenessthermal oxidation

Mathematics Subject Classification ID

Heat equation (35K05) Groups and semigroups of linear operators (47D03) Free boundary problems for PDEs (35R35) Generalized solutions to partial differential equations (35Dxx)

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