Analysis of film strain and stress in a film-substrate cantilever system
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Publication:948543
DOI10.1007/S11433-008-0131-5zbMath1171.74376OpenAlexW2271976948MaRDI QIDQ948543
Publication date: 16 October 2008
Published in: Science in China. Series G (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s11433-008-0131-5
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