Influence of inhomogeneity and nonlinearity of multilayer structure on dopant redistribution in delta-doped area during epitaxial overgrowth

DOI10.1016/J.NONRWA.2009.02.028zbMath1192.35140OpenAlexW2009437480MaRDI QIDQ974546

Publication date: 3 June 2010

Published in: Nonlinear Analysis. Real World Applications (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.nonrwa.2009.02.028

zbMATH Keywords

alternative approach of modeling delta-doping epitaxial growth of heterostructure

Mathematics Subject Classification ID

PDEs in connection with fluid mechanics (35Q35) Statistical mechanics of crystals (82D25) Statistical mechanics of semiconductors (82D37) Liquid crystals (76A15)

Cites Work

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