Modeling and analysis of electrostatic MEMS filters

DOI10.1007/S11071-009-9603-ZzbMath1189.78042OpenAlexW2026965105MaRDI QIDQ979402

Bashar K. Hammad, Eihab M. Abdel-Rahman, Ali Hasan Nayfeh

Publication date: 28 June 2010

Published in: Nonlinear Dynamics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s11071-009-9603-z

zbMATH Keywords

discretizationmodelingnonlinearitiesresonancelocalizationfilterscapacitance transducers

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55)

Related Items (1)

Multifidelity modeling and comparative analysis of electrically coupled microbeams under squeeze-film damping effect

Cites Work

• Unnamed Item
• Dynamics of a nonlinear microresonator based on resonantly interacting flexural-torsional modes
• Dynamic pull-in phenomenon in MEMS resonators
• A study of the nonlinear response of a resonant microbeam to an electric actuation

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