Combined effects of inertia and thermophoresis on particle deposition onto a wafer with wavy surface
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Publication:981291
DOI10.1016/j.ijheatmasstransfer.2005.09.036zbMath1189.76669OpenAlexW2071353744MaRDI QIDQ981291
Publication date: 30 June 2010
Published in: International Journal of Heat and Mass Transfer (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.ijheatmasstransfer.2005.09.036
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