Neural network reinforced point defect concentration estimation model for Czochralski-grown silicon crystals

DOI10.1016/J.MCM.2009.08.020zbMath1193.82050OpenAlexW1973196473MaRDI QIDQ988437

Serhan Yamacli, Mutlu Avci

Publication date: 26 August 2010

Published in: Mathematical and Computer Modelling (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.mcm.2009.08.020

zbMATH Keywords

Czochralski processpoint defect modelingsilicon ingot

Mathematics Subject Classification ID

Statistical mechanics of crystals (82D25) PDEs on graphs and networks (ramified or polygonal spaces) (35R02)

Uses Software

• Unnamed Item
• crysvun++

Cites Work

• Neural network-based design approach for submicron MOS integrated circuits

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