Heuristic algorithms to solve the capacity allocation problem in photolithography area (CAPPA)

DOI10.1007/S00291-007-0093-4zbMath1193.90228OpenAlexW2111675018MaRDI QIDQ991812

Chun-Ying Huang, Amy H. I. Lee, Shu-Hsing Chung

Publication date: 8 September 2010

Published in: OR Spectrum (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s00291-007-0093-4

zbMATH Keywords

linear programmingheuristicmachine dedicationphotolithography areaprocess window

Mathematics Subject Classification ID

Applications of mathematical programming (90C90) Linear programming (90C05)

Cites Work

• A capacity allocation problem with integer side constraints

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